LA2954C - UL - RFT for the Supply of an Atomic Layer Deposition (ALD) Instrument

Description

University of Limerick require a lab-scale Atomic Layer Deposition (ALD) fluidized bed particle coating reactor for the use of preparing advanced battery electrode materials. The ALD base unit instrument must include: • Two (2) high vapor pressure (HVP) precursor delivery lines are included in the base system. HVP lines that can be heated to and are rated to 200°C. • One (1) 10 – 150 mL reactor vessel. • Integrated mass spectrometer. • Vacuum pump. • Reactor that is rated up to 400°C. • Multiple fluidization aids to enable uniform coatings. • Recipe based software with automated feedback control. • Emergency stop capability. • A removable reactor vessel. • Electrical connections matched to international standards.