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Awarded

Tabletop Lithografie Direktschreib-Systems mit sub-?m Auflösung

Published

Description

Beschaffung eines präzisen Lithografie Direktschreib-Systems geeignet für Substraten mit unterschiedlichen Größen bestehend aus einem Laser-Modul mit <= 400 nm Auflösung, eine Direktschreiboption zum Schnellschreiben größerer Flächen, mit automatischer motorisierter Höheneinstellungsoptionen sowie einer Graustufenschreiboption.

Timeline

Publish date

4 months ago

Award date

4 months ago

Buyer information

Technische Universität Hamburg

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Notice topic

Machines and apparatus with individual functions

Related topics

Miscellaneous data recordersParticle acceleratorsElectronic detection apparatusElectrical equipment and apparatus
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