Awarded contract
Published
PVD System
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Description
Beschaffung eines PVD Systems, geeignet für die Abscheidung metallischer und nichtmetallischer Schichten mittels Kathodenzerstäubung nach dem DC und RF Prinzip mit Magnetron auf unterschiedlichen Substraten (Silizium, Glas, Keramik und Polymeren) in Größen von Chips 10x10 mm² bis 100 mm Wafern.
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