Cluster-Trockenätzanlage
Published
Description
Cluster Trockenätzanlage für die Strukturierung von Aluminium und Aluminiumnitrid-Schichten
Timeline
Publish date
2 years ago
Award date
2 years ago
Buyer information
Hahn-Schickard-Gesellschaft für angewandte Forschung e. V.
- Contact:
- Hahn-Schickard-Gesellschaft für angewandte Forschung e.V.
- Email:
- markus.nagler@hahn-schickard.de
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