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QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information

Published

Description

Queen’s University Belfast ("Queen’s") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen’s. At present we have a technical requirement for an instrument that includes;- 1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2. A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3. A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4. An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity. - 5. A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers. Lot 1: Please refer to the Published RFI Documentation

Timeline

Publish date

2 years ago

Buyer information

Queen's University Belfast

Contact:
Emmett McCann
Email:
e.mccann@qub.ac.uk

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Notice topic

Laboratory, optical and precision equipments (excl. glasses)

Related topics

Miscellaneous evaluation or testing instrumentsIndustrial process control equipment and remote-control equipmentTime registers and the like; parking metersOptical instrumentsChecking and testing apparatusInstruments for checking physical characteristics

Source

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