Hydrogen generation system for semiconductor manufacture

Description

The National Epitaxy Facility (NEF) at the University of Sheffield is a nationally important supplier of semiconductor materials for research and development in Universities and industry across the UK. A reliable supply of high purity hydrogen is key to the work of the NEF and our other research groups in semiconductor production. Our existing PEM-based hydrogen generation system is approaching end of life and a replacement system is required. Our hydrogen supply operates at 30 bar and a peak mass flow rate of approximately 25kg per day, with an average daily consumption of 12kg per day. Our hydrogen system feeds purifiers that ideally require 99.999% purity to minimise maintenance costs and ensure high purity feed to our reactors. We are looking for a replacement hydrogen generator that can meet our existing demand in the existing footprint, with a reliable, sustainable and cost effective technology. Reliability of supply is a key factor, and hence an exemplary after sales service is a must.