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Équipements de systèmes de pompes pour un implanteur VIISTA 900 3D

Published

Description

Le présent marché a pour objet de fixer les conditions selon lesquelles le CEA confie au Titulaire, qui accepte, la fourniture et l'installation de deux systèmes de pompage ainsi qu'un système d'abattement des effluents d'un équipement d'implantation ionique. Lot 1: Système de pompage primaire Système de pompage primaire sec. Il est demandé en : option 1 : système de régulation de température/refroidissement option 2 : transformateur d'alimentation option 3 : le coût du transport Lot 2: Système de pompage turbo moléculaire Équipement d'un système de pompage turbo-moléculaire Il est demandé en : option 4 : système de régulation de température/refroidissement option 5 : transformateur d'alimentation option 6 : le coût du transport Lot 3: Système d'abattement Système d'abattement. Il est demandé en : option 7 : système de régulation de température/refroidissement option 8 : transformateur d'alimentation option 9 : le coût du transport

Timeline

Publish date

2 years ago

Close date

a year ago

Buyer information

CEA/Grenoble

Contact:
Joanna LE DONNÉ
Email:
joanna.ledonne@cea.fr

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Notice topics

Machinery and apparatus for filtering or purifying gasesMachinery for the heat treatment of gasMicroelectronic machinery and apparatus and microsystemsPumps

Related topics

Machinery for the heat treatment of materialsFiltering apparatusElectrostatic air and gas cleanersHeat-exchange units, air-conditioning and refrigerating equipment, and filtering machineryLaboratory pumps and accessoriesCentrifugal pumps and liquid elevators

Source

Ted (OJEU)
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